FMA18RC10质量流量控制器流量仪表FMA18RC10质量流量控制器 美国Omega
FMA18RC10质量流量控制器
流量与液位 » 电子质量流量计 » 质量流量控制器 » FMA5400A and FMA5500A
Economical Gas Mass Controllers With or Without Integral Display
FMA5400A and FMA5500A
NIST Traceable Calibration
Reads and Controls Gas Mass Flow Without Temperature or Pressure Compensation
Available in Economical Aluminum or Corrosion-Resistant 316 SS
Tiltable LCD Display for Easy Reading
产品描述
The FMA5400A/5500A Series electronic gas mass flow controllers provide for controlling the flow of a wide variety of gases from 0-10 SCCM up to 100 SLM. Utilizing heat transfer through a heated tube to measure molecular gas flowrate, the FMA5400A/5500A provides measurement of direct gas mass flowrate, without the need to compensate for variations in gas temperature or pressure (within stated limits). They are available in an economical aluminum/brass construction for typical gas flows and a 316 SS construction for applications requiring more corrosion resistance. The FMA5400A series without integral display is supplied with both an analog 0-5 Vdc and 4 to 20 mA output for remote monitoring; the FMA5500A series has both an integral 3-1/2 digit display and analog output. The display is tiltable over 90 degrees for viewing convenience. The display is calibrated standard to read out directly in SCCM or SLM for nitrogen (other gas calibrations available on special order).
The FMA5400A/5500A mass flow controllers feature a built-in normally-closed electromagnetic valve for maintaining a constant flowrate regardless of variations in inlet or outlet pressures. The setpoint is controlled either locally via a potentiometer accessible through an access window in the case or remotely via an analog 0-5 Vdc or 4-20 mA signal (field selectable). The FMA5400A/5500A series require 12 to 26 Vdc power @ 800 mA maximum, which can be supplied by the FMA545PW wall plug-in socket power supply. The electronics are reverse polarity protected and have a resettable fuse. Model number FMA545C (supplied separately) provides a mating 15-pin “D” connector with 8 feet of shielded cable for accessing the analog output signals and power input connections. The LCD supplied with the FMA5500A series is connected to the lower electronics via a modular plug. The LCD can be remotely located by purchasing an FMA18RC remote cable assembly–you must then build your own assembly for panel mounting the LCD.
SPECIFICATIONS
Accuracy: ±1.5% FS, including linearity over 15 to 25°C (59 to 77°F) and
0.7 to 4.2 kg/cm² (10 to 60 psia) ±3% FS for units ≥ 100 SLM from o to 20% of range.
Repeatability: ±0.5% of full scale
Temp Coefficient: 0.15% FS/°C
Pressure Coefficient: 0.01% FS per psi (0.07 bar)
Maximum Pressure Drop: 50 psid
Response Time: 5 seconds to within ±2% of set flow rate over 25 to 100% FS
Max Gas Pressure: 70 kg/cm2 gage (1000 psig)(For units up to 100 SLM); 35 kg/cm2 gage (500 psig); 1.76 kg/cm (25 psig) optimum
Gas and Ambient Temp: 5 to 50°C (41 to 122°F)
Leak Integrity: 1 x 10-7 cc/sec of He max to outside environment
Materials in Fluid Contact:
Aluminum Models: Anodized aluminum, 316 SS, brass and FKM O-rings
Stainless Steel Models: 316 SS and FKM O-rings
Output Signal:
Linear 0 to 5 Vdc: 1000 Ω minimum load
4 to 20 mA: 50 to 500 Ω loop resistance, ±20 mV max noise
Transducer Power: 12 to 26 Vdc @ 800 mA standard Turndown Ratio: 40:1
Shipping Weight: 1.8 kg (4 lb)
Compliance: EN55011 class 1, class B; EN50082-1
Attitude Sensitivity: With horizontal flow path, no shift in calibration up to +20 degree pitch
Gas Relative Humidity: 0 to 70% RH
Min Pressure Drop
SLM ≤9 10-30 50 60-100 200 500 1000
psid 1.1 3.9 8 18.9 10 12 15
注: * Comes with ¾ FNPT connections instead of compression fittings. Comes complete with compression fittings, NIST certificate and operator’s manual.
产品编号生成器
在此处生成您自己的产品编号
(1) (2) (3) (4)
FMA A
数量: 价格: ¥5,730.00
选项说明:
(1) Display 选项:
54 for without display
55 for with display
(2) Max Flow Rate 选项:
02 for 10 SCCM
04 for 20 SCCM
06 for 50 SCCM
08 for 100 SCCM
10 for 200 SCCM
12 for 500 SCCM
14 for 1 SLM
16 for 2 SLM
18 for 5 SLM
20 for 10 SLM
23 for 15 SLM
24 for 20 SLM
26 for 30 SLM
27 for 40 SLM
28 for 50 SLM
40 for 60 SLM
41 for 80 SLM
42 for 100 SLM
(3) Body 选项:
无（选项为空白） for aluminum/brass body
-ST for 316 SS body
(4) Oxygen Cleaned Units 选项:
无（选项为空白） for None
-C for Oxygen Cleaned Units
注: 并非所有组合都有效，请查阅规格表上的有效产品编号。
产品编号 产品描述
Mass Flow Controllers with Display, Al/Br Body (Use Part Number Builder for 316 SS Construction)
FMA5502A 0 to10 SCCM
FMA5504A 0 to 20 SCCM
FMA5506A 0 to 50 SCCM
FMA5508A 0 to 100 SCCM
FMA5510A 0 to 200 SCCM
FMA5512A 0 to 500 SCCM
FMA5514A 0 to 1 SLM
FMA5516A 0 to 2 SLM
FMA5518A 0 to 5 SLM
FMA5520A 0 to 10 SLM
FMA5523A 0 to 15 SLM
FMA5524A 0 to 20 SLM
FMA5526A 0 to 30 SLM
FMA5527A 0 to 40 SLM
FMA5528A 0 to 50 SLM
FMA5540A 0 to 60 SLM
FMA5541A 0 to 80 SLM
FMA5542A 0 to 100 SLM
Mass Flow Controllers Without Display, Al/Br Body (Use Part Number Builder for 316 SS construction)
FMA5402A-ST 0 to 10 SCCM
FMA5404A-ST 0 to 20 SCCM
FMA5406A-ST 0 to 50 SCCM
FMA5408A-ST 0 to 100 SCCM
FMA5410A-ST 0 to 200 SCCM
FMA5412A-ST 0 to 500 SCCM
FMA5414A-ST 0 to 1 SLM
FMA5416A-ST 0 to 2 SLM
FMA5418A-ST 0 to 5 SLM
FMA5420A-ST 0 to 10 SLM
FMA5423A-ST 0 to 15 SLM
FMA5424A-ST 0 to 20 SLM
FMA5426A-ST 0 to 30 SLM
FMA5427A-ST 0 to 40 SLM
FMA5428A-ST 0 to 50 SLM
FMA5440A-ST 0 to 60 SLM
FMA5441A-ST 0 to 80 SLM
FMA5442A-ST 0 to 100 SLM
Accessories
FMA545C Female 15-pin D-connector w/8 ft shielded cable
FMA545C-10 Female 15-pin D-connector w/10 ft shielded cable
FMA545C-12 Female 15-pin D-connector w/12 ft shielded cable
FMA545C-18 Female 15-pin D-connector w/18 ft shielded cable
FMA545C-25 Female 15-pin D-connector w/8 ft shielded cable
FMA18RC10 10 ft Cable for remote LCD mounting
FMA18RC25 25 ft Cable for remote LCD mounting
产品编号
FMA5502A
FMA5504A
FMA5506A
FMA5508A
FMA5510A
FMA5512A
FMA5514A
FMA5516A
FMA5518A
FMA5520A
FMA5523A
FMA5524A
FMA5526A
FMA5527A
FMA5528A
FMA5540A
FMA5541A
FMA5542A
FMA5402A-ST
FMA5404A-ST
FMA5406A-ST
FMA5408A-ST
FMA5410A-ST
FMA5412A-ST
FMA5414A-ST
FMA5416A-ST
FMA5418A-ST
FMA5420A-ST
FMA5423A-ST
FMA5424A-ST
FMA5426A-ST
FMA5427A-ST
FMA5428A-ST
FMA5440A-ST
FMA5441A-ST
FMA5442A-ST
FMA545C
FMA545C-10
FMA545C-12
FMA545C-18
FMA545C-25
FMA18RC10
FMA18RC25
FMA5402A
FMA5402A-ST
FMA5404A
FMA5404A-CO2
FMA5404A-ST
FMA5404A-ST-CO2-(10SCCM)
FMA5406A
FMA5406A-ST
FMA5408A
FMA5408A-CH4
FMA5408A-H2-14.5/0PSIG
FMA5408A-ST
FMA5408A-ST-HE
FMA5410A
FMA5410A-ST
FMA5410A-ST-N2-50/0PSIG
FMA5412
FMA5412A
FMA5412A-AR-14.5/0PSIG
FMA5412A-ST
FMA5412A-ST-O2-C
FMA5414A
FMA5414A-ST
FMA5414A-ST-CO-50/0PSIG
FMA5414A-ST-HE
FMA5414A-ST-N2-50/0PSIG
FMA5416A
FMA5416A-ARGON
FMA5416A-O2-C
FMA5416A-ST
FMA5416A-ST-H2-50/0PSIG
FMA5416A-ST-O2CLEAN
FMA5418
FMA5418-ARGON-24VDC
FMA5418A
FMA5418A-ST
FMA5418A-ST-C
FMA5420
FMA5420A
FMA5420A-ST
FMA5420A-ST-0-5NLM-N2
FMA5420A-ST-EPR
FMA5420A-ST-K
FMA5420A-ST-NLM
FMA5420ST
FMA5423
FMA5423A
FMA5423A-C
FMA5423A-ST
FMA5424A
FMA5424A-ST
FMA5426A
FMA5426A-ST
FMA5427A
FMA5427A-ST
FMA5427A-ST-0-30NLM-N2
FMA5428A
FMA5428A-ST
FMA5440A
FMA5440A-ST
FMA5441A
FMA5441A-ST
FMA5442A
FMA5442A-C3H8
FMA5442A-ST
FMA5442A-ST-NL
FMA5443
FMA5443-24VDC
FMA5443ST
FMA5443ST-24VDC
FMA5444
FMA5444-0-350NLM-AIR
FMA5444-24V
FMA5444-24VDC
FMA5444-AIR-0-250NLM
FMA5444ST
FMA5444ST-24VDC
FMA5445
FMA5445-24VDC
FMA5445ST
FMA5445ST-24VDC
FMA545C
FMA545C-10
FMA545C-12
FMA545C-18
FMA545C-25
FMA545PW
FMA545PW-220VAC
FMA545PW-24VDC
FMA5502A
FMA5502A-BUNA
FMA5502A-CH4
FMA5502A-ST
FMA5502A-ST-C
FMA5504A
FMA5504A-6MMCF
FMA5504A-CO2
FMA5504A-ST
FMA5504A-ST-N20
FMA5506
FMA5506A
FMA5506A-H2
FMA5506A-ST
FMA5508A
FMA5508A-AR
FMA5508A-CO2
FMA5508A-H2
FMA5508A-H2-20/0PSIG
FMA5508A-H2-25/0PSIG
FMA5508A-O2-20/0PSIG
FMA5508A-ST
FMA5510A
FMA5510A-1%O2/99%HE
FMA5510A-1%O2/99%HE-40/0PSIG
FMA5510A-AR
FMA5510A-C
FMA5510A-H2
FMA5510A-N2
FMA5510A-ST
FMA5510A-ST-CH4
FMA5510A-ST-H2
FMA5510A-ST-K
FMA5510A-ST-NH3-20/0PSIG-EPR
FMA5512A
FMA5512A-AR
FMA5512A-CH4
FMA5512A-H2
FMA5512A-O2
FMA5512A-ST
FMA5512A-ST-AR
FMA5512A-ST-CO
FMA5512A-ST-CO2
FMA5512A-ST-N2
FMA5514
FMA5514A
FMA5514A-ST
FMA5514A-ST-CL2
FMA5514A-ST-O2-O2CLEAN
FMA5516
FMA5516-ST-K
FMA5516A
FMA5516A-AR
FMA5516A-ST
FMA5516A-ST-C
FMA5516A-ST-EPDM
FMA5516A-ST-EPR
FMA5518A
FMA5518A-AIR-20/0PSI-70F
FMA5518A-H2-40/0PSIG
FMA5518A-ST
FMA5518A-ST-C
FMA5518A-ST-EPDM
FMA5518A-ST-NH3-40/0PSIG-EPR
FMA5520A
FMA5520A-CH4
FMA5520A-ST
FMA5523A
FMA5523A-ST
FMA5524A
FMA5524A-AR-50/14.7PSIG
FMA5524A-ST
FMA5526A
FMA5526A-ST
FMA5526A-ST-C
FMA5527A
FMA5527A-ST
FMA5528A
FMA5528A-CO2,20/0PSIG
FMA5528A-ST
FMA5540A
FMA5540A-AR
FMA5540A-ST
FMA5541A
FMA5541A-H2
FMA5541A-ST
FMA5541A-ST-NH3-KALREZ
FMA5542A
FMA5542A-ST
FMA5542A-ST-AIR
FMA5542A-ST-AR
FMA5542A-ST-CO2
FMA5542A-ST-H2-50/0PSIG
FMA18RC10质量流量控制器
FMA18RC10质量流量控制器流量仪表FMA18RC10质量流量控制器 美国Omega衍生阅读
FMA18RC10质量流量控制器流量仪表FMA18RC10质量流量控制器 美国Omega相关产品
