FMA-7410美国OMEGA FMA-7410
FMA-7410
流量与液位 » 电子质量流量计 » 质量流量控制器 » FMA7400 & FMA7500 Series
多量程多种气体流量计和控制器
FMA7400 & FMA7500 Series
In-Process Programming
Programmable Full Scale
50:1 Turndown
RS485 Standard
316 SS VCR Fitting Available
Fast Response Time <1 Second
Multiple Native Gas Calibration Reference
Configurable
Seven-point NIST Calibration Certificate Standard
产品描述
OMEGA® FMA7400/7500 (elastomer seal) and (-SS) (metal seal) thermal mass flow meters and controllers achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications. The FMA7400/7500 is designed to overcome a long-standing limitation of many thermal mass flow units when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy robbing viscosity and density differences.
The Omega FMA7400/7500 database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the FMA7400/7500 series among the most accurate and flexible mass flow designs available today. The FMA7400/7500 series is the perfect choice for customers who use thermal mass flowmeters or controllers on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy.
The Omega FMA7400/7500 series features a corrosionresistant Hastelloy® C-22 sensor for durable, long-term operation. Settling time is less than a second and full scale accuracy is 1%, this ensures that the FMA7400/7500 will provide reliable flow measurement or flow control in demanding gas flow applications. Both FMA7400/7500 and the (-SS) version achieve excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes.
A major advancement over traditional single point gas conversion factors, Omega delivers up to a three times improvement in process gas accuracy. This is achieved through advanced gas modeling plus extensive actual gas testing protocols that provide extremely accurate compensation. This also allows the device to be quickly and easily configured for another gas and/or flow range without sacrificing accuracy or range-ability. Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, compensates for gas density and viscosity effects, and ensures smooth, overshoot-free transitions between flow rates with excellent steady state stability supplying unparalleled flexibility. Re-programming is simple and fast; a new gas and range can be programmed in under 60 seconds.
SPECIFICATIONS
Full Scale Flow Range: 3 sccm to 50 slm (depending on model number)
Flow Accuracy: ±1% set-point 35 to 100%, ±0.35% full scale 2 to 35%, ±3% with selected gas feature
Repeatability and Reproducibility: < 0.2% S.P.
Linearity: ±0.5% full scale (included in accuracy)
Response Time (Settling Time): <1 second (within 2% for steps 0 to 10 through 0 to 100%)
Control Range: 2 to 100% (normally closed valve)
Number of Bins: 10 bins
Valve Shut Down: < 1% of full scale (normally closed valve)
Zero Stability: < ±0.5% full scale per year
Pressure Coefficient: 0.03% per psi (0 to 50 psi N2)
Attitude Sensitivity: <0.25% span change @ 90° after re-zeroing (N2 @ 50 psi)
Auto Zero: Optional
Reference Temperature: 0°C (standard), 15, 20 or 21.1°C (optional)
Operating Temperature Range: 5 to 50°C (41 to 122°F)
Maximum Operating Pressure: 150 psig (10 bar)
Differential Pressure Range: 3 to 860 sccm = 7 to 45 psid, 861 to 7200 sccm = 15 to 45 psid, 7201 to 50000 sccm = 25 to 45 psid
Note: High density gases require additional differential pressure. Example: Argon gas applications require an additional 10 psid differential pressure.
Leak Integrity (External): Elastomer seal 1x10-9 atm. cc/sec He, metal seal 1x10-10 atm. cc/sec He
Valve Type: Normally closed (controllers only), normally open with automatic shut-off (optional)
Fitting: ¼" compression (standard), ¼" VCR (standard for -SS models)
Downstream Conditions: Atmosphere (standard), vacuum or positive pressure (optional)
Primary Wetted Materials: 316 stainless steel, hastelloy C-22, 17-7 PH, 430 SS
External Seals: FKM (standard)
Optional: Buna, Perfluroelastomer, E PDM or Neoprene, 316 SS (standard for -SS)
Internal Seals/Valve Seat: FKM (standard), PFA (standard for -SS)
Optional: Buna, Perfluroelastomer, E PDM or Neoprene
Electrical
Diagnostic/Service Port: All variations have an RS485 diagnostic/service port via 2.5 mm jack
RS485/Analog (Standard)
Digital Communication Protocol: Proprietary protocol based on HART® command set
Electrical Connection: 1 x 15-pin male Sub-D, (A), AUX valve drive (RELAY)
Analog I/O: 0 to 5V (standard), 0 to 10V, 0 to 20 mA, or 4 to 20 mA (optional)
Power: 12 to 24 Vdc/normal operation 7 watt maximum purge 8 watt
Profibus (Optional)
Electrical Connection: 1 x 15-pin male sub-D/1 x 9-pin female sub-D
Analog I/O: 0 to 5V, 0 to 20 mA or 4 to 20 mA
Power: ±13.5 Vdc to ±27 Vdc/7 watt maximum, purge 8 watt
DeviceNet (optional)
Electrical Connection: 1 x M12 with threaded coupling nut (B)
Analog I/O: 0 to 5V
Power: ±11 Vdc to ±25 Vdc/7 watt maximum, purge 8 watt
Diagnostics and Display
Status Lights: Controller health, network status
Alarms: Sensor output, control valve output, over temperature, power surge/ sag, network interruption
Compliance
Environmental: CE, RoHS
注: Comes complete with 7-point NIST calibration, link to software, and operator's manual.
Full scale ranges are for Nitrogen equivalent with a 0ºC reference temperature. Selecting other gases or reference temperatures will result in different available ranges.
Standard: 1/4" compression fitting, atmosphere downstream, RS485, 0 to 5 V input/output and reference temperature 0ºC.
产品编号 产品描述
Mass Flow Meters FMA-7502 Minimum Range 1 to 3 sccm, Maximum Range 3 to 10 sccm
FMA-7503 Minimum Range 3 to 11 sccm, Maximum Range 11 to 30 sccm
FMA-7504 Minimum Range 11 to 31 sccm, Maximum Range 31 to 92 sccm
FMA-7505 Minimum Range 11 to 93 sccm, Maximum Range 93 to 2800 sccm
FMA-7506 Minimum Range 93 to 281 sccm, Maximum Range 281 to 860 sccm
FMA-7507 Minimum Range 0.28 to 0.86 lpm, Maximum Range 0.86 to 2.6 lpm
FMA-7508 Minimum Range 0.86 to 2.6 lpm, Maximum Range 2.6 to 7.2 lpm
FMA-7509 Minimum Range 2.6 to 7.2 lpm, Maximum Range 15 to 30 lpm
FMA-7510 Minimum Range 7.2 to 15 lpm, Maximum Range 15 to 30 lpm
FMA-7511 Minimum Range 15 to 30 lpm, Maximum Range 30 to 50 lpm
Mass Flow Controllers
FMA-7402 Minimum Range 1 to 3 sccm, Maximum Range 3 to 10 sccm
FMA-7403 Minimum Range 3 to 11 sccm, Maximum Range 11 to 30 sccm
FMA-7404 Minimum Range 11 to 31 sccm, Maximum Range 31 to 92 sccm
FMA-7405 Minimum Range 31 to 93 sccm, Maximum Range 93 to 280 sccm
FMA-7406 Minimum Range 93 to 281 sccm, Maximum Range 281 to 860 sccm
FMA-7407 Minimum Range 0.28 to 0.86 lpm, Maximum Range 0.86 to 2.6 lpm
FMA-7408 Minimum Range 0.86 to 2.6 lpm, Maximum Range 2.6 to 7.2 lpm
FMA-7409 Minimum Range 2.6 to 7.2 lpm, Maximum Range 7.2 to 15 lpm
FMA-7410 Minimum Range 7.2 to 15 lpm, Maximum Range 15 to 30 lpm
FMA-7411 Minimum Range 15 to 30 lpm, Maximum Range 30 to 50 lpm
Accessories (one kit per order required to operate)
FMA-745-CK Configuration kit includes downloadable software, programming cable and RS232/485 converter
FMA-745-CKP Configuration kit includes downloadable software, cable, converter, power supply and power cord
FMA-7503
FMA-7504
FMA-7505
FMA-7506
FMA-7507
FMA-7508
FMA-7509
FMA-7510
FMA-7511
FMA-7402
FMA-7403
FMA-7404
FMA-7405
FMA-7406
FMA-7407
FMA-7408
FMA-7409
FMA-7410
FMA-7411
FMA-745-CK
FMA-745-CKP
FMA-7410
FMA-7410美国OMEGA FMA-7410衍生阅读
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